A large-solid-angle electron energy analyzer

Tsuyoshi Ishikawa, Masahiro Goto, Takeshi Nakajima, Hideo Iwai, Yoshimasa Nihei, Chuhei Oshima

研究成果: Article査読

抄録

We have developed new type electron energy analyzer equipped with an electrostatic compact electron source. A display-type electron analyzer was developed by Daimon et al. on 1988, but the energy analysis is done by the Combination of low energy pass and high energy pass filters, and hence, the system is very complex. By limiting the acceptable solid angle of the display-type electron analyzer, we realized the energy analysis without any additional filters. The features of our system are 1) a simple structure, 2) a large working space, 3) no angular aberration, 4) a relatively large acceptable solid angle, and 5) conservation of the angular information. We report the preriminary data of the performance of this analyzer.

本文言語English
ページ(範囲)1013-1017
ページ数5
ジャーナルShinku/Journal of the Vacuum Society of Japan
44
12
出版ステータスPublished - 2001

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 表面および界面

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