By limiting the entrance solid angle of the display-type analyzer, new wide solid-angle electron analyzer with the simple configuration was realized. This analyzer provides "angle-resolved" and "energy-resolved" electron pattern. By using CCD camera with MCP, we measured angle-resolved energy spectra. We show typical EELS spectra of ZrB2 (0001) surface. The energy resolution and angle resolution were evaluated from the data. From LEED pattern of Si (111) - 7 × 7 surface, an angular resolution of 0.5° at the diffraction (00) spot was achieved (0.065 Å-1 at 209 eV). Ratio of the energy width to the pass energy Δ/E0 of the analyzer were 0.017-0.022 depending on the incidence angle.
|ジャーナル||Shinku/Journal of the Vacuum Society of Japan|
|出版ステータス||Published - 2004|
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