抄録
By limiting the entrance solid angle of the display-type analyzer, new wide solid-angle electron analyzer with the simple configuration was realized. This analyzer provides "angle-resolved" and "energy-resolved" electron pattern. By using CCD camera with MCP, we measured angle-resolved energy spectra. We show typical EELS spectra of ZrB2 (0001) surface. The energy resolution and angle resolution were evaluated from the data. From LEED pattern of Si (111) - 7 × 7 surface, an angular resolution of 0.5° at the diffraction (00) spot was achieved (0.065 Å-1 at 209 eV). Ratio of the energy width to the pass energy Δ/E0 of the analyzer were 0.017-0.022 depending on the incidence angle.
本文言語 | English |
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ページ(範囲) | 2-6 |
ページ数 | 5 |
ジャーナル | Shinku/Journal of the Vacuum Society of Japan |
巻 | 47 |
号 | 1 |
出版ステータス | Published - 2004 |
ASJC Scopus subject areas
- 電子工学および電気工学
- 表面および界面