We have developed new type electron energy analyzer equipped with an electrostatic compact electron source. A display-type electron analyzer was developed by Daimon et al. on 1988, but the energy analysis is done by the Combination of low energy pass and high energy pass filters, and hence, the system is very complex. By limiting the acceptable solid angle of the display-type electron analyzer, we realized the energy analysis without any additional filters. The features of our system are 1) a simple structure, 2) a large working space, 3) no angular aberration, 4) a relatively large acceptable solid angle, and 5) conservation of the angular information. We report the preriminary data of the performance of this analyzer.
|ジャーナル||Shinku/Journal of the Vacuum Society of Japan|
|出版ステータス||Published - 2001|
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