A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor

Etsuji Ogawa, Kei Masunishi, Tamio Ikehashi, Tomohiro Saito, Hiroaki Yamazaki, Yasushi Tomizawa, Yoshiaki Sugizaki

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Actuators used in RF-MEMS tunable capacitors have an issue of creep-induced deformation. The creep is caused by a ductile-metal beam which is indispensable to attain the low loss. To avoid this issue, we previously reported an actuator structure that uses a brittle material, silicon nitride (SiN), at the stress-concentrated spring portions [1]. The present paper aims to clarify a long-term creep immunity of the actuator. We first determined parameters of Norton's law by measurements and then carried out Finite Element Method (FEM) simulations. As a result, we found that the shift of the up-state capacitance is 2.2% after keeping the actuator in down-state position for 3 years at 85°C.

本文言語English
ホスト出版物のタイトル2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
ページ2466-2469
ページ数4
DOI
出版ステータスPublished - 2011 9 1
外部発表はい
イベント2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
継続期間: 2011 6 52011 6 9

出版物シリーズ

名前2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
国/地域China
CityBeijing
Period11/6/511/6/9

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学

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