A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement

Ryunosuke Gando, Shunta Maeda, Kei Masunishi, Yasushi Tomizawa, Etsuji Ogawa, Yohei Hatakeyama, Tetsuro Itakura, Tamio Ikehashi

研究成果: Conference contribution

11 被引用数 (Scopus)

抄録

We present two new techniques effective in realizing high precision MEMS Rate Integrating Gyroscope (RIG). First one is the application of the Catch-and-Release (CR) scheme, reported previously, to the RIG. We show that continuous angle measurement can be attained by catching and releasing a pair of CR-RIGs in a complementary manner. Direct angle measurement is also demonstrated by adopting a doughnut-shaped CR-RIG. Second one is a resistive tunable damper that can compensate the damping asymmetry, a major cause of the angle drift. In this tunable damper, the mechanical damping factor can be tuned by resistance and voltage. We show that the theoretical model fits well with the experimental results.

本文言語English
ホスト出版物のタイトル2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
出版社Institute of Electrical and Electronics Engineers Inc.
ページ944-947
ページ数4
ISBN(電子版)9781538647820
DOI
出版ステータスPublished - 2018 4 24
外部発表はい
イベント31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
継続期間: 2018 1 212018 1 25

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2018-January
ISSN(印刷版)1084-6999

Other

Other31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
CountryUnited Kingdom
CityBelfast
Period18/1/2118/1/25

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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