A method for evaluating acoustic Bragg reflector by ultrasonic microscope

Naoki Ishii, Keita Kondo, Takahiko Yanagitani

研究成果: Conference article査読

抄録

Bragg reflector in solidly mounted resonators (SMR) is usually evaluated by comparing entire impedance properties of SMR with the properties of free standing FBAR. Therefore, we cannot obtain piezoelectric layer and Bragg reflector separatory. We here present a experimental method for evaluating acoustic properties of Bragg reflectors using pulse-echo method in the GHz ranges. High quality Sc0.40Al0.60N film transducers with acoustic conversion loss of 5.4 dB and fractional band width of 106% were employed. Ta2O5/SiO2Bragg reflectors were prepared as a test sample. As a result, the experimentally extracted mechanical properties of Bragg reflector showed good agreement with theoretical prediction simulated by Mason's equivalent circuit model.

本文言語English
ジャーナルIEEE International Ultrasonics Symposium, IUS
DOI
出版ステータスPublished - 2021
イベント2021 IEEE International Ultrasonics Symposium, IUS 2021 - Virtual, Online, China
継続期間: 2011 9月 112011 9月 16

ASJC Scopus subject areas

  • 音響学および超音波学

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