A Method for Extracting Mechanical Q Factor of the Piezoelectric Film without Etching Substrate

Sarina Kinoshita, Takahiko Yanagitani

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

The sharpness of FBAR filters are determined by mechanical Q factors (Qm) of piezoelectric thin films when other electrical loss is negligibly small. In this study, we introduce a new method for estimating Qm of films using piezoelectric film/substrate structures (HBAR structures) without using self-standing film structures. When Qm of the film (Qpiezo) is lower than that of the substrate (Qsub), Q factor of the entire HBAR (QHBAR) decrease due to the dumping of the film which have larger mechanical loss, only in the vicinity of the resonant frequency. Therefore, Qpiezo can be estimated from the amount of reduction in the QHBAR when Qsub is known. We investigated whether the differences of the Qm factor among various samples are able to be detected. Obvious decrease of experimental QHBAR in the vicinity of the resonant frequency of each film was observed as expected. The amount of reduction of ScAlN is larger than that of pure AlN, indicating that mechanical Qpiezo of ScAlN is lower than that of pure AlN as expected.

本文言語English
ホスト出版物のタイトル2019 IEEE International Ultrasonics Symposium, IUS 2019
出版社IEEE Computer Society
ページ299-300
ページ数2
ISBN(電子版)9781728145969
DOI
出版ステータスPublished - 2019 10
イベント2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom
継続期間: 2019 10 62019 10 9

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
2019-October
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Conference

Conference2019 IEEE International Ultrasonics Symposium, IUS 2019
CountryUnited Kingdom
CityGlasgow
Period19/10/619/10/9

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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