A method to estimate kt2 of piezoelectric films from the change of lattice strain by XRD without removing substrate

Takumi Soutome, Takahiko Yanagitani

研究成果: Conference contribution

抄録

Electromechanical coupling coefficient kt2 is one of the important parameters to estimate performance of BAW filters. The resonance-antiresonance method according to IEEE standard is common method to determine kt2. However, this method requires a self-standing film structure (FBAR). In this study, we propose the kt2 estimation method for a film/substrate structure (HBAR). This method allows us to estimate kt2 for as grown wafers without removing substrates. The lattice strains of piezoelectric crystals are induced when electric field are applied. The strains can be measured by X-ray diffraction (XRD). Therefore, the kt2 of the film is expected to be indirectly determined by the use of piezoelectric equations. The values of kt2 determined by this method were compared with the resonance-antiresonance method and the conversion loss method.

本文言語English
ホスト出版物のタイトル2019 IEEE International Ultrasonics Symposium, IUS 2019
出版社IEEE Computer Society
ページ301-304
ページ数4
ISBN(電子版)9781728145969
DOI
出版ステータスPublished - 2019 10月
イベント2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom
継続期間: 2019 10月 62019 10月 9

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
2019-October
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Conference

Conference2019 IEEE International Ultrasonics Symposium, IUS 2019
国/地域United Kingdom
CityGlasgow
Period19/10/619/10/9

ASJC Scopus subject areas

  • 音響学および超音波学

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