A micro chemical analyzing system integrated on a silicon wafer

Shigeru Nakagawa, Shuichi Shoji, Masayoshi Esashi

研究成果: Paper査読

50 被引用数 (Scopus)

抄録

The fabrication of a three-way valve on a silicon wafer by micromachining techniques is presented. The valve consists of two silicon wafers, a pyrex glass, and a piezoelectric actuator. This three-way valve can control gas flow or liquid flow with voltage applied to the actuator. The liquid flow can be controlled from 0.1 μ1/min to 70 μ1/min. The results from integrating the three-way valve with a micropump to produce a flow injection analyzing system are discussed.

本文言語English
ページ89-94
ページ数6
出版ステータスPublished - 1990 12 1
外部発表はい
イベントProceedings - IEEE Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Napa Valley, CA, USA
継続期間: 1990 2 111990 2 14

Other

OtherProceedings - IEEE Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
CityNapa Valley, CA, USA
Period90/2/1190/2/14

ASJC Scopus subject areas

  • 工学(全般)

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