A new cluster-ion-beam source for secondary ion mass spectrometry (SIMS) using the electrospray of a pure ionic liquid under high vacuum

Yukio Fujiwara*, Naoaki Saito, Hidehiko Nonaka, Taisuke Nakanaga, Shingo Ichimura

*この研究の対応する著者

研究成果: Article査読

13 被引用数 (Scopus)

抄録

Electrospray characteristics were studied using a pure room-temperature molten salt (i.e., an ionic liquid) at pressures around 10-5 Pa as well as at atmospheric pressure. The ionic liquid N,N-diethyl-N-methyl-N-(2-methoxyethyl)ammonium bis(trifluoromethanesulfonyl)imide was tested, which has negligible vapor pressure and high conductivity. During electrospray, the ionic liquid was introduced at a constant flow rate into a stainless-steel capillary (i.d. 30 μm). It was demonstrated that stable electrosprayed currents exceeding ±1 μΑ were continuously produced in both positive and negative modes. The electrosprayed currents in a high vacuum were twice those at atmospheric pressure. It was found that gas pressure rose slightly with increasing electrosprayed currents. Residual gas analysis revealed that gas component at negative mode was different from that at positive mode. Experimental results indicate that vacuum electrospray of pure ionic liquids is applicable to a massive-cluster beam source for SIMS.

本文言語English
ページ(範囲)1938-1941
ページ数4
ジャーナルNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
268
11-12
DOI
出版ステータスPublished - 2010 6月
外部発表はい

ASJC Scopus subject areas

  • 核物理学および高エネルギー物理学
  • 器械工学

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