A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate

Yui Yamakawa, Kohei Sano, Rei Karasawa, Takahiko Yanagitani

    研究成果: Conference contribution

    抄録

    In order to study relaxation characteristics of viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. We, therefore, report a new type HBAR (High-overtone Bulk Acoustic Resonator: shear mode ScAlN film on AT-cut quartz plate) sensor which makes it possible to operate in a wide frequency range as shown in Fig. 1. When a thickness shear acoustic mode (TSM) resonator is in contact with a liquid sample, the shear wave penetrates into the liquid by the depth of δ (called penetration depth [1]). Thus, the liquid viscosity can be determined from the amount of the resonant frequency shift due to a δ thick mass loading layer mounted on the resonator. We choose AT-cut quartz as the substrate whose TCF is zero at room temperature to suppress frequency shifts due to the temperature change. TCF of the whole resonator stack greatly decreases considering the mass ratio between the thin piezoelectric film and the much thicker substrate. In this study, frequency shifts were measured for various concentration of glycerine solutions in order to demonstrate usefulness of the HBAR. [1] T. Nakamoto and T. Moriizumi, Jpn. J. Appl. Phys., 29 963 (1990).

    元の言語English
    ホスト出版物のタイトル2017 IEEE International Ultrasonics Symposium, IUS 2017
    出版者IEEE Computer Society
    ISBN(電子版)9781538633830
    DOI
    出版物ステータスPublished - 2017 10 31
    イベント2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
    継続期間: 2017 9 62017 9 9

    Other

    Other2017 IEEE International Ultrasonics Symposium, IUS 2017
    United States
    Washington
    期間17/9/617/9/9

    Fingerprint

    thick plates
    quartz
    frequency ranges
    resonators
    viscosity
    frequency shift
    shear
    sensors
    liquids
    thin films
    sweep frequency
    temperature
    acoustics
    viscoelasticity
    mass ratios
    S waves
    resonant frequencies
    penetration
    harmonics
    room temperature

    ASJC Scopus subject areas

    • Acoustics and Ultrasonics

    これを引用

    Yamakawa, Y., Sano, K., Karasawa, R., & Yanagitani, T. (2017). A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate. : 2017 IEEE International Ultrasonics Symposium, IUS 2017 [8092520] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2017.8092520

    A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate. / Yamakawa, Yui; Sano, Kohei; Karasawa, Rei; Yanagitani, Takahiko.

    2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 2017. 8092520.

    研究成果: Conference contribution

    Yamakawa, Y, Sano, K, Karasawa, R & Yanagitani, T 2017, A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate. : 2017 IEEE International Ultrasonics Symposium, IUS 2017., 8092520, IEEE Computer Society, 2017 IEEE International Ultrasonics Symposium, IUS 2017, Washington, United States, 17/9/6. https://doi.org/10.1109/ULTSYM.2017.8092520
    Yamakawa Y, Sano K, Karasawa R, Yanagitani T. A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate. : 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society. 2017. 8092520 https://doi.org/10.1109/ULTSYM.2017.8092520
    Yamakawa, Yui ; Sano, Kohei ; Karasawa, Rei ; Yanagitani, Takahiko. / A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate. 2017 IEEE International Ultrasonics Symposium, IUS 2017. IEEE Computer Society, 2017.
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    abstract = "In order to study relaxation characteristics of viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. We, therefore, report a new type HBAR (High-overtone Bulk Acoustic Resonator: shear mode ScAlN film on AT-cut quartz plate) sensor which makes it possible to operate in a wide frequency range as shown in Fig. 1. When a thickness shear acoustic mode (TSM) resonator is in contact with a liquid sample, the shear wave penetrates into the liquid by the depth of δ (called penetration depth [1]). Thus, the liquid viscosity can be determined from the amount of the resonant frequency shift due to a δ thick mass loading layer mounted on the resonator. We choose AT-cut quartz as the substrate whose TCF is zero at room temperature to suppress frequency shifts due to the temperature change. TCF of the whole resonator stack greatly decreases considering the mass ratio between the thin piezoelectric film and the much thicker substrate. In this study, frequency shifts were measured for various concentration of glycerine solutions in order to demonstrate usefulness of the HBAR. [1] T. Nakamoto and T. Moriizumi, Jpn. J. Appl. Phys., 29 963 (1990).",
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