A new type wide-frequency-range shear viscosity sensor using c-axis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate

Yui Yamakawa, Ko Hei Sano, Rei Karasawa, Takahiko Yanagitani

研究成果: Conference contribution

抄録

In order to study relaxation characteristics of viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. We, therefore, report a new type HBAR (High overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. We choose AT-cut quartz as the substrate whose TCF is zero at room temperature to suppress frequency shifts due to the temperature change. TCF of the HBAR in air is measured to be -3.2 ppm/°C, which demonstrates the great improvement of TCF compared with single ScAlN films (-62 ppm/°C) due to the zero TCF AT-cut quartz substrate. In this study, frequency shifts and frequency peak attenuations were measured for various concentration of glycerin solutions to demonstrate usefulness of the HBAR viscosity measurement.

本文言語English
ホスト出版物のタイトル2017 IEEE International Ultrasonics Symposium, IUS 2017
出版社IEEE Computer Society
ISBN(電子版)9781538633830
DOI
出版ステータスPublished - 2017 10 31
イベント2017 IEEE International Ultrasonics Symposium, IUS 2017 - Washington, United States
継続期間: 2017 9 62017 9 9

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Other

Other2017 IEEE International Ultrasonics Symposium, IUS 2017
CountryUnited States
CityWashington
Period17/9/617/9/9

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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