A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application

Hironobu Sato*, Takayuki Kakinuma, Jeung Sang Go, Shuichi Shoji

*この研究の対応する著者

研究成果: Paper査読

44 被引用数 (Scopus)

抄録

This paper presents a novel fabrication method of in-channel three-dimensional micromesh structures using the conventional photolithography. The micromesh was realized by exposing UV light from the backside of the SU-8 coated metal-patterned glass substrate for different angles. Numbers of exposure and irradiation angle decided the shape and the size of micromesh. Based on this technique, three different micromesh-inserted microchannel structures were fabricated. For hydrodynamic characterization, their flow resistances were measured. Finally, for the application of Micro Total Analysis System (μTAS), the microfilter was fabricated and its filtering property was demonstrated.

本文言語English
ページ223-226
ページ数4
出版ステータスPublished - 2003 7 23
イベントIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan
継続期間: 2003 1 192003 1 23

Conference

ConferenceIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
国/地域Japan
CityKyoto
Period03/1/1903/1/23

ASJC Scopus subject areas

  • 制御およびシステム工学
  • 機械工学
  • 電子工学および電気工学

フィンガープリント

「A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル