A piezoelectric gyroscope with tilted c-axis ScAlN thin-films

Yuna Koike, Ryo Seki, Takahiko Yanagitani

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

Transmission and detection type MEMS gyroscope with a combination of two c-axis tilted ScAlN films where in-plane tilt angles are orthogonal to each other are fabricated. Thus, the polarities of shear wave generated at input piezoelectric film and detected at output piezoelectric film are orthogonal. Although we could not fabricate the setup of the Coriolis force detection experiment for the thin film MEMS devices, a large measurement system for large PZT plate device could be prepared. A preliminary experiment to demonstrate the Coriolis force detection by the transmission and detection type gyroscope have been performed by using a combination of the large shear mode PZT plate operating in the MHz range, instead of the c-axis tilted ScAlN film devices operating in the sub GHz range. In addition, we developed the theoretical model of the transmission and detection type gyroscope device using Mason's equivalent circuit model.

本文言語English
ホスト出版物のタイトルIUS 2022 - IEEE International Ultrasonics Symposium
出版社IEEE Computer Society
ISBN(電子版)9781665466578
DOI
出版ステータスPublished - 2022
イベント2022 IEEE International Ultrasonics Symposium, IUS 2022 - Venice, Italy
継続期間: 2022 10月 102022 10月 13

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
2022-October
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Conference

Conference2022 IEEE International Ultrasonics Symposium, IUS 2022
国/地域Italy
CityVenice
Period22/10/1022/10/13

ASJC Scopus subject areas

  • 音響学および超音波学

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