A piezoelectric quartz microactuator for a large pseudo-static displacement

Hiroshi Toshiyoshi, Dai Kobayashi, Hiroyuki Fujita, Toshitsugu Ueda*

*この研究の対応する著者

研究成果: Article査読

5 被引用数 (Scopus)

抄録

A piezoelectric quartz microactuator based on a new driving mechanism is reported. The actuator is fabricated by anisotropic etching of a Z-cut quartz substrate and operated by means of piezoelectricity. The uniqueness of the actuator is that large static displacement is generated under AC voltage at the mechanical resonant frequency (8.5 kHz). Therefore, we call it a pseudo-static displacement actuator. The pseudo-static displacement is relatively large (40 μm), considering the size of the actuator (5 mm across). Furthermore, it is 20 times larger than the displacement in true DC voltage operation.

本文言語English
ページ(範囲)L1806-L1808
ジャーナルJapanese Journal of Applied Physics
33
12B
DOI
出版ステータスPublished - 1994
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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