A quartz galvanometer for optical scanning in a laser printer application

Naoki Sugiyama*, Daisuke Yamazaki, Toshitsugu Ueda

*この研究の対応する著者

    研究成果: Conference contribution

    2 被引用数 (Scopus)

    抄録

    Using quartz micromachining, a compact galvanometer for optical scanning in a laser printer (LP) is developed. The merits of the device are compact size (24 mm × 24 mm × 14 mm), large scan angle (a 70° peak-to-peak effective optical angle), high speed scanning (a speed of 840 scans per second), and a structure suitable for mass production. The features of the galvanometer were evaluated and it was found that the jitter is less than 0.03%, the wobble is less than 90 μrad, and the stability of the scan angle over a temperature range of 5 to 50°C was less than a 0.5% change. These values satisfy the specifications of optical scanning in a LP.

    本文言語English
    ホスト出版物のタイトルTransducers '91
    Place of PublicationPiscataway, NJ, United States
    出版社Publ by IEEE
    ページ734-737
    ページ数4
    ISBN(印刷版)0879425857
    出版ステータスPublished - 1991
    イベント1991 International Conference on Solid-State Sensors and Actuators - San Francisco, CA, USA
    継続期間: 1991 6 241991 6 28

    Other

    Other1991 International Conference on Solid-State Sensors and Actuators
    CitySan Francisco, CA, USA
    Period91/6/2491/6/28

    ASJC Scopus subject areas

    • 工学(全般)

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