A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption

Hiroaki Yamazaki*, Yumi Hayashi, Kei Masunishi, Daiki Ono, Tamio Ikehashi

*この研究の対応する著者

研究成果: Article査読

7 被引用数 (Scopus)

抄録

This paper addresses a capacitive MEMS hydrogen sensor using Pd based metallic glass for future hydrogen society. Firstly, we investigate PdCuSi as Pd based metallic glass (MG) and show this material is promising for capacitive MEMS hydrogen sensor. Secondly, we apply the Pd based MG to a hydrogen sensor having inverted T-shaped electrode. The sensor was fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis free and fast response property at room temperature.

本文言語English
ページ(範囲)312-318
ページ数7
ジャーナルieej transactions on sensors and micromachines
138
7
DOI
出版ステータスPublished - 2018 1月 1
外部発表はい

ASJC Scopus subject areas

  • 機械工学
  • 電子工学および電気工学

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