A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption
Hiroaki Yamazaki*, Yumi Hayashi, Kei Masunishi, Daiki Ono, Tamio Ikehashi
*この研究の対応する著者
研究成果: Article › 査読
7
被引用数
(Scopus)