A scalable Si-based micro thermoelectric generator

Takanobu Watanabe, Shuhei Asada, Taiyu Xu, Shuichiro Hashimoto, Shunsuke Ohba, Yuya Himeda, Ryo Yamato, Hui Zhang, Motohiro Tomita, Takashi Matsukawa, Yoshinari Kamakura, Hiroya Ikeda

研究成果: Conference contribution

10 被引用数 (Scopus)

抄録

A new device architecture of micro thermoelectric generator (μ-TEG) is proposed. The μ-TEG utilizes silicon nanowires as the thermoelectric (TE) material, and it can be fabricated by the CMOS-compatible process. It is driven by an 'evanescent thermal field' exuding around a heat flow perpendicular to the substrate. We demonstrate experimentally that the TE power increases in the shorter TE leg lengths. The results show that the TE power density is scalable by miniaturizing and integrating the proposed structure.

本文言語English
ホスト出版物のタイトル2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings
出版社Institute of Electrical and Electronics Engineers Inc.
ページ86-87
ページ数2
ISBN(電子版)9781509046591
DOI
出版ステータスPublished - 2017 6 13
イベント2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Toyama, Japan
継続期間: 2017 2 282017 3 2

出版物シリーズ

名前2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings

Other

Other2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017
CountryJapan
CityToyama
Period17/2/2817/3/2

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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