A scalable Si-based micro thermoelectric generator

Takanobu Watanabe, Shuhei Asada, Taiyu Xu, Shuichiro Hashimoto, Shunsuke Ohba, Yuya Himeda, Ryo Yamato, Hui Zhang, Motohiro Tomita, Takashi Matsukawa, Yoshinari Kamakura, Hiroya Ikeda

研究成果: Conference contribution

10 引用 (Scopus)

抄録

A new device architecture of micro thermoelectric generator (μ-TEG) is proposed. The μ-TEG utilizes silicon nanowires as the thermoelectric (TE) material, and it can be fabricated by the CMOS-compatible process. It is driven by an 'evanescent thermal field' exuding around a heat flow perpendicular to the substrate. We demonstrate experimentally that the TE power increases in the shorter TE leg lengths. The results show that the TE power density is scalable by miniaturizing and integrating the proposed structure.

元の言語English
ホスト出版物のタイトル2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings
出版者Institute of Electrical and Electronics Engineers Inc.
ページ86-87
ページ数2
ISBN(電子版)9781509046591
DOI
出版物ステータスPublished - 2017 6 13
イベント2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Toyama, Japan
継続期間: 2017 2 282017 3 2

Other

Other2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017
Japan
Toyama
期間17/2/2817/3/2

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Thermoelectric power
Nanowires
Heat transfer
Silicon
Substrates
Hot Temperature

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

これを引用

Watanabe, T., Asada, S., Xu, T., Hashimoto, S., Ohba, S., Himeda, Y., ... Ikeda, H. (2017). A scalable Si-based micro thermoelectric generator. : 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings (pp. 86-87). [7947519] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EDTM.2017.7947519

A scalable Si-based micro thermoelectric generator. / Watanabe, Takanobu; Asada, Shuhei; Xu, Taiyu; Hashimoto, Shuichiro; Ohba, Shunsuke; Himeda, Yuya; Yamato, Ryo; Zhang, Hui; Tomita, Motohiro; Matsukawa, Takashi; Kamakura, Yoshinari; Ikeda, Hiroya.

2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2017. p. 86-87 7947519.

研究成果: Conference contribution

Watanabe, T, Asada, S, Xu, T, Hashimoto, S, Ohba, S, Himeda, Y, Yamato, R, Zhang, H, Tomita, M, Matsukawa, T, Kamakura, Y & Ikeda, H 2017, A scalable Si-based micro thermoelectric generator. : 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings., 7947519, Institute of Electrical and Electronics Engineers Inc., pp. 86-87, 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017, Toyama, Japan, 17/2/28. https://doi.org/10.1109/EDTM.2017.7947519
Watanabe T, Asada S, Xu T, Hashimoto S, Ohba S, Himeda Y その他. A scalable Si-based micro thermoelectric generator. : 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2017. p. 86-87. 7947519 https://doi.org/10.1109/EDTM.2017.7947519
Watanabe, Takanobu ; Asada, Shuhei ; Xu, Taiyu ; Hashimoto, Shuichiro ; Ohba, Shunsuke ; Himeda, Yuya ; Yamato, Ryo ; Zhang, Hui ; Tomita, Motohiro ; Matsukawa, Takashi ; Kamakura, Yoshinari ; Ikeda, Hiroya. / A scalable Si-based micro thermoelectric generator. 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 86-87
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