To fabricate a high-pressure micropump, a diaphragm-type pump using passive check valves has been studied and a novel micro check valve developed. It has a simple structure consisting of a silicone rubber float and a through-hole. The reverse flow resistance of this valve is about 10 atm min/μl and the forward-to-reverse flow ratio is about 1000 at an applied pressure of 0.5 atm. This valve can be applied to the high-pressure micropump for pressures up to at least 1 atm.
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