A study on low temperature SAM modified POM direct bonding affected by VUV/O3 irradiation

Weixin Fu; Bo Ma; Hiroyuki Kuwae; Shuichi Shoji; Jun Mizuno

doi:10.23919/LTB-3D.2017.7947465

A study on low temperature SAM modified POM direct bonding affected by VUV/O₃ irradiation

Weixin Fu, Bo Ma, Hiroyuki Kuwae, Shuichi Shoji, Jun Mizuno

ナノ・ライフ創新研究機構

研究成果: Conference contribution

1 被引用数 (Scopus)

抄録

A direct bonding of polyoxymethelene (POM) was feasible at 100 °C by using self-assembled monolayers (SAM) as surface modification method. (3-Aminopropyl)triethoxysilane (APTES) and (3-Glycidyloxypropyl)trimethoxysilane (GOPTS) were applied in our work. Surface modification carried out with different VUV/O₃ irradiation conditions showed different bonding strength. In addition, the bonding condition with highest strength had an average strength of 0.37 MPa. This technology was expected to be used in packaging for micro/nano electromechanical systems (MEMS/NMES), such as bio-/medical devices.

本文言語	English
ホスト出版物のタイトル	Proceedings of 2017 5th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2017
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	69
ページ数	1
ISBN（電子版）	9784904743034
DOI	https://doi.org/10.23919/LTB-3D.2017.7947465
出版ステータス	Published - 2017 6月 13
イベント	5th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2017 - Tokyo, Japan 継続期間: 2017 5月 16 → 2017 5月 18

Other

Other	5th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2017
国/地域	Japan
City	Tokyo
Period	17/5/16 → 17/5/18

ASJC Scopus subject areas

電子工学および電気工学
産業および生産工学
電子材料、光学材料、および磁性材料
表面、皮膜および薄膜

文献へのアクセス

10.23919/LTB-3D.2017.7947465

他のファイルとリンク

引用スタイル

Fu, W., Ma, B., Kuwae, H., Shoji, S., & Mizuno, J. (2017). A study on low temperature SAM modified POM direct bonding affected by VUV/O₃ irradiation. In Proceedings of 2017 5th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2017 (pp. 69). [7947465] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/LTB-3D.2017.7947465

Fu, W, Ma, B, Kuwae, H, Shoji, S & Mizuno, J 2017, A study on low temperature SAM modified POM direct bonding affected by VUV/O₃ irradiation. in Proceedings of 2017 5th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2017., 7947465, Institute of Electrical and Electronics Engineers Inc., pp. 69, 5th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2017, Tokyo, Japan, 17/5/16. https://doi.org/10.23919/LTB-3D.2017.7947465

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abstract = "A direct bonding of polyoxymethelene (POM) was feasible at 100 °C by using self-assembled monolayers (SAM) as surface modification method. (3-Aminopropyl)triethoxysilane (APTES) and (3-Glycidyloxypropyl)trimethoxysilane (GOPTS) were applied in our work. Surface modification carried out with different VUV/O3 irradiation conditions showed different bonding strength. In addition, the bonding condition with highest strength had an average strength of 0.37 MPa. This technology was expected to be used in packaging for micro/nano electromechanical systems (MEMS/NMES), such as bio-/medical devices.",

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