A surface plasmon resonance sensor with A V-shaped silicon prism array

N. Tsujiuchi, E. Iwase, K. Hoshino, K. Matsumoto, I. Shimoyama

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

A surface plasmon resonance (SPR) sensor with a prism array made by silicon microfabrication techniques is proposed. We fabricated silicon prisms arrayed in 200 μm in pitch by anisotropic wet etching for deflecting light. We measured SPR curves in specimen of air, water and ethanol using near-infrared laser light (1550 nm) and obtained the SPR dip in each measurement. We fabricated a flexible flap, which was actuated by Lorentz force, to change the incident angle. The silicon prism chip was attached on the flap, the SPR curve was measured by scanning the incident angle of laser light with the flap.

本文言語English
ホスト出版物のタイトル19th IEEE International Conference on Micro Electro Mechanical Systems
ページ522-525
ページ数4
出版ステータスPublished - 2006
外部発表はい
イベント19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
継続期間: 2006 1 222006 1 26

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2006
ISSN(印刷版)1084-6999

Conference

Conference19th IEEE International Conference on Micro Electro Mechanical Systems
国/地域Turkey
CityIstanbul
Period06/1/2206/1/26

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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