A surface plasmon resonance sensor with A V-shaped silicon prism array

N. Tsujiuchi, E. Iwase, K. Hoshino, K. Matsumoto, I. Shimoyama

研究成果: Conference contribution

3 引用 (Scopus)

抜粋

A surface plasmon resonance (SPR) sensor with a prism array made by silicon microfabrication techniques is proposed. We fabricated silicon prisms arrayed in 200 μm in pitch by anisotropic wet etching for deflecting light. We measured SPR curves in specimen of air, water and ethanol using near-infrared laser light (1550 nm) and obtained the SPR dip in each measurement. We fabricated a flexible flap, which was actuated by Lorentz force, to change the incident angle. The silicon prism chip was attached on the flap, the SPR curve was measured by scanning the incident angle of laser light with the flap.

元の言語English
ホスト出版物のタイトル19th IEEE International Conference on Micro Electro Mechanical Systems
ページ522-525
ページ数4
出版物ステータスPublished - 2006
外部発表Yes
イベント19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
継続期間: 2006 1 222006 1 26

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2006
ISSN(印刷物)1084-6999

Conference

Conference19th IEEE International Conference on Micro Electro Mechanical Systems
Turkey
Istanbul
期間06/1/2206/1/26

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • これを引用

    Tsujiuchi, N., Iwase, E., Hoshino, K., Matsumoto, K., & Shimoyama, I. (2006). A surface plasmon resonance sensor with A V-shaped silicon prism array. : 19th IEEE International Conference on Micro Electro Mechanical Systems (pp. 522-525). [1627851] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); 巻数 2006).