We present a novel solid-electrolyte switch ("NanoBridge") promising for application to field programmable gate array (FPGA). We replace a former solid electrolyte of CU2S with Ta2O5, which has a Siprocess compatibility, . As a result, we successfully control the turn-on voltage to adapt to CMOS operation. The Ta2O 5-NanoBridge exhibits a high reliability of cycling endurance (> 104) and a stability against EM (> 10years at 2.6mA at RT). Furthermore, we demonstrate that the conducting path of the switch is a Cu precipitate with 30nm in diameter, which possibly enables to scale down the switch.
|ジャーナル||Digest of Technical Papers - Symposium on VLSI Technology|
|出版ステータス||Published - 2007 12月 1|
|イベント||2007 Symposium on VLSI Technology, VLSIT 2007 - Kyoto, Japan|
継続期間: 2007 6月 12 → 2007 6月 14
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