A Ta2O5 solid-electrolyte switch with improved reliability

Toshitsugu Sakamoto*, Naoki Banno, Noriyuki Iguchi, Hisao Kawaura, Hiroshi Sunamura, Shinji Fujieda, Kazuya Terabe, Tsuyoshi Hasegawa, Masakazu Aono

*この研究の対応する著者

研究成果: Conference article査読

70 被引用数 (Scopus)

抄録

We present a novel solid-electrolyte switch ("NanoBridge") promising for application to field programmable gate array (FPGA). We replace a former solid electrolyte of CU2S with Ta2O5, which has a Siprocess compatibility, . As a result, we successfully control the turn-on voltage to adapt to CMOS operation. The Ta2O 5-NanoBridge exhibits a high reliability of cycling endurance (> 104) and a stability against EM (> 10years at 2.6mA at RT). Furthermore, we demonstrate that the conducting path of the switch is a Cu precipitate with 30nm in diameter, which possibly enables to scale down the switch.

本文言語English
論文番号4339718
ページ(範囲)38-39
ページ数2
ジャーナルDigest of Technical Papers - Symposium on VLSI Technology
DOI
出版ステータスPublished - 2007 12月 1
外部発表はい
イベント2007 Symposium on VLSI Technology, VLSIT 2007 - Kyoto, Japan
継続期間: 2007 6月 122007 6月 14

ASJC Scopus subject areas

  • 電子工学および電気工学

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