A trend mining method for yield improvement based on trend in time series

Hidetaka Tsuda, Hidehiro Shirai, Masahiro Terabe, Kazuo Hashimoto, Ayumi Shinohara

研究成果: Conference contribution

抄録

We have developed a trend mining method for yield improvement which extracts non-random trend in time series buried in huge time series data. This method efficiently extracts failure causes based on trend in time series that had been almost unable to be analyzed by conventional methods.

元の言語English
ホスト出版物のタイトルIEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
ページ247-250
ページ数4
出版物ステータスPublished - 2008
外部発表Yes
イベント2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008 - Tokyo
継続期間: 2008 10 272008 10 29

Other

Other2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008
Tokyo
期間08/10/2708/10/29

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Time series

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Industrial and Manufacturing Engineering

これを引用

Tsuda, H., Shirai, H., Terabe, M., Hashimoto, K., & Shinohara, A. (2008). A trend mining method for yield improvement based on trend in time series. : IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (pp. 247-250). [5714967]

A trend mining method for yield improvement based on trend in time series. / Tsuda, Hidetaka; Shirai, Hidehiro; Terabe, Masahiro; Hashimoto, Kazuo; Shinohara, Ayumi.

IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings. 2008. p. 247-250 5714967.

研究成果: Conference contribution

Tsuda, H, Shirai, H, Terabe, M, Hashimoto, K & Shinohara, A 2008, A trend mining method for yield improvement based on trend in time series. : IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings., 5714967, pp. 247-250, 2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008, Tokyo, 08/10/27.
Tsuda H, Shirai H, Terabe M, Hashimoto K, Shinohara A. A trend mining method for yield improvement based on trend in time series. : IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings. 2008. p. 247-250. 5714967
Tsuda, Hidetaka ; Shirai, Hidehiro ; Terabe, Masahiro ; Hashimoto, Kazuo ; Shinohara, Ayumi. / A trend mining method for yield improvement based on trend in time series. IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings. 2008. pp. 247-250
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