A trend mining method for yield improvement based on trend in time series

Hidetaka Tsuda, Hidehiro Shirai, Masahiro Terabe, Kazuo Hashimoto, Ayumi Shinohara

研究成果: Conference contribution

抄録

We have developed a trend mining method for yield improvement which extracts non-random trend in time series buried in huge time series data. This method efficiently extracts failure causes based on trend in time series that had been almost unable to be analyzed by conventional methods.

本文言語English
ホスト出版物のタイトル2008 International Symposium on Semiconductor Manufacturing, ISSM 2008
ページ247-250
ページ数4
出版ステータスPublished - 2008 12 1
外部発表はい
イベント2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008 - Tokyo, Japan
継続期間: 2008 10 272008 10 29

出版物シリーズ

名前IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
ISSN(印刷版)1523-553X

Conference

Conference2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008
国/地域Japan
CityTokyo
Period08/10/2708/10/29

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 工学(全般)
  • 産業および生産工学
  • 電子工学および電気工学

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