A trend mining method for yield improvement based on trend in time series

Hidetaka Tsuda, Hidehiro Shirai, Masahiro Terabe, Kazuo Hashimoto, Ayumi Shinohara

研究成果: Conference contribution

抜粋

We have developed a trend mining method for yield improvement which extracts non-random trend in time series buried in huge time series data. This method efficiently extracts failure causes based on trend in time series that had been almost unable to be analyzed by conventional methods.

元の言語English
ホスト出版物のタイトル2008 International Symposium on Semiconductor Manufacturing, ISSM 2008
ページ247-250
ページ数4
出版物ステータスPublished - 2008 12 1
イベント2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008 - Tokyo, Japan
継続期間: 2008 10 272008 10 29

出版物シリーズ

名前IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
ISSN(印刷物)1523-553X

Conference

Conference2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008
Japan
Tokyo
期間08/10/2708/10/29

    フィンガープリント

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Engineering(all)
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

これを引用

Tsuda, H., Shirai, H., Terabe, M., Hashimoto, K., & Shinohara, A. (2008). A trend mining method for yield improvement based on trend in time series. : 2008 International Symposium on Semiconductor Manufacturing, ISSM 2008 (pp. 247-250). [5714967] (IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings).