Absolute pressure sensors by air-tight electrical feedthrough structure

Masayoshi Esashi*, Yoshinori Matsumoto, Shuichi Shoji

*この研究の対応する著者

研究成果: Article査読

33 被引用数 (Scopus)

抄録

A new electrical feedthrough structure for silicon absolute pressure sensors has been developed, and has been applied to an integrated capacitive pressure sensor, a piezoresistive pressure sensor and a piezoresistive force sensor array for tactile imaging. The feedthrough structure is constructed from Pyrex glass, which has narrow through-holes engraved by electrochemical discharge drilling, and silicon, which has the diffused electrical feedthrough from the reference cavity. The reference cavity is hermetically sealed by glass-silicon anodic bonding. The metal contacts to the diffused feedthrough at the bottom of glass holes are made by CrCuAu evaporation through a metal mask. Using this structure, an electrical feedthrough from the reference cavity can be made without any air leakage. This structure is useful for the fabrication of absolute pressure sensors, acceleration sensors and so on.

本文言語English
ページ(範囲)1048-1052
ページ数5
ジャーナルSensors and Actuators: A. Physical
23
1-3
DOI
出版ステータスPublished - 1990 4
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学

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