TY - JOUR
T1 - Absolute rotary angular measurement by using multi electrode circular position sensitive detector
AU - Nakajima, Hajime
AU - Sumi, Kazuhiko
AU - Inujima, Hiroshi
PY - 2009/11/26
Y1 - 2009/11/26
N2 - A new type or circular semiconductor position sensitive detector (PSD) called multi electrode circular PSD (MbCPSD), which consists of a photosensitive region, a résister line, and 16 electrodes, is presented. The photosensitive region is in the shape of a ring, which is formed by the radial arrangement of long and narrow photodiodes. The outer ends of the photodiodes are connected to the continuous resistor line. Photoexcited carriers generated in the photodiode flow to the resistor line and are extracted by the multi electrode, which divides the resistor into 16 equal parts. The angular position of the light spot is calculated from the output current of the selected electrodes. Compared to conventional circular PSDs, the reliability of angular measurement is better, this is because the ME-CPSD does not have an undetectable region caused by unavoidable discontinuities in the structure of conventional circular PSDs. This device can not only measure the absolute angular position but also carry out a more precise angular measurement by selecting narrower electrode intervals. This device has the capability of realizing a high-precision noncontact angular measurement system with a simple construction.
AB - A new type or circular semiconductor position sensitive detector (PSD) called multi electrode circular PSD (MbCPSD), which consists of a photosensitive region, a résister line, and 16 electrodes, is presented. The photosensitive region is in the shape of a ring, which is formed by the radial arrangement of long and narrow photodiodes. The outer ends of the photodiodes are connected to the continuous resistor line. Photoexcited carriers generated in the photodiode flow to the resistor line and are extracted by the multi electrode, which divides the resistor into 16 equal parts. The angular position of the light spot is calculated from the output current of the selected electrodes. Compared to conventional circular PSDs, the reliability of angular measurement is better, this is because the ME-CPSD does not have an undetectable region caused by unavoidable discontinuities in the structure of conventional circular PSDs. This device can not only measure the absolute angular position but also carry out a more precise angular measurement by selecting narrower electrode intervals. This device has the capability of realizing a high-precision noncontact angular measurement system with a simple construction.
KW - Angular measurement
KW - Multi electrodes
KW - Position sensitive detector
KW - Rotary encoders
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U2 - 10.1541/ieejias.129.989
DO - 10.1541/ieejias.129.989
M3 - Article
AN - SCOPUS:70450137107
VL - 129
SP - 989
EP - 994
JO - IEEJ Transactions on Industry Applications
JF - IEEJ Transactions on Industry Applications
SN - 0913-6339
IS - 10
ER -