Adsorption and thermal or photodecomposition of triethylgallium and trimethylgallium on si(Lll)-7 x7

Ken Ichi Fukui, Wataru Mizutani, Hiroshi Onishi, Shingo Ichimura, Hazime Shimizu, Yasuhiro Iwasawa

研究成果: Article

2 引用 (Scopus)

抜粋

Adsorption and thermal or photodecomposition of triethylgallium (TEG) and trimethylgallium (TMG) on Si(lll)-7x7 were investigated using a home-built scanning tunneling microscope (STM), Auger electron spectroscopy (AES), and thermal desorption spectroscopy (TDS). Adsorption of TEG and TMG at room temperature gave bright protrusions of GatoHs^ia) and Ga(CH3)a;(a) (x = 2, 3) on atop sites of Si adatoms with a slight preference for center adatoms over comer ones. The Ga(C2Hs)x(a) and Ga(CH3)x(a) species were decomposed by UV irradiation probably due to absorption of UV photons by these adsorbates. Thermal decomposition of TEG on the 7x7 surface led to severe carbon deposition, particularly at low initial coverage of TEG, in contrast to the result reported on Si(l00)-2 x 1.

元の言語English
ページ(範囲)4910-4916
ページ数7
ジャーナルJapanese journal of applied physics
34
発行部数9R
DOI
出版物ステータスPublished - 1995 9
外部発表Yes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

フィンガープリント Adsorption and thermal or photodecomposition of triethylgallium and trimethylgallium on si(Lll)-7 x7' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用