Aerosol deposition fabrication of transparent electro-optic films for optical modulator

Masafumi Nakada*, Keishi Ohashi, Hiroki Tsuda, Jun Akedo

*この研究の対応する著者

研究成果: Conference contribution

抄録

High-transparent Pb(Zr,Ti)O3 and (Pb,La)(Zr,Ti)O3 films, over 1 μm thick, which have acceptable transmittance loss for use as optical devices, were directly deposited on glass substrates by AD. We found the ferroelectric Pb(Zr,Ti)O3 film by AD produced a fairly high EO coefficient (>150 pm/V), approximately 10 times larger than that of LiNbO3. We developed a Fabry-Perot (FP) optical modulator with electro-optic films fabricated by AD. Transmittance spectra of the FP optical modulator coincided with the optical simulation spectra, which indicated that optical scattering in AD films and at the surface/boundary were very small. We demonstrated an optical intensity modulation with applied electric field to EO film of ferroelectric Pb (Zr, Ti)O3.

本文言語English
ホスト出版物のタイトルIMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006
ページ482-487
ページ数6
出版ステータスPublished - 2006 12 1
外部発表はい
イベント2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006 - Denver, CO, United States
継続期間: 2006 4 242006 4 27

出版物シリーズ

名前IMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006

Conference

Conference2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006
国/地域United States
CityDenver, CO
Period06/4/2406/4/27

ASJC Scopus subject areas

  • ハードウェアとアーキテクチャ
  • セラミックおよび複合材料

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