抄録
An atomic force microscopy (AFM) tip characterizer with measurement ranges from 7.7 nm to 131 nm was developed using Si/SiO2 multilayers. This characterizer was constructed with isolated line structures and comb- shaped trench structures. The shape of a standard Si AFM tip was estimated using this characterizer. The result shows that this Si/SiO2 multilayer-type tip characterizer has good potential for the characterization of AFM tips with a fine radius.
本文言語 | English |
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ページ(範囲) | 293-296 |
ページ数 | 4 |
ジャーナル | e-Journal of Surface Science and Nanotechnology |
巻 | 9 |
DOI | |
出版ステータス | Published - 2011 7月 16 |
外部発表 | はい |
ASJC Scopus subject areas
- バイオテクノロジー
- バイオエンジニアリング
- 凝縮系物理学
- 材料力学
- 表面および界面
- 表面、皮膜および薄膜