All plastic microfluidic device with built-in 3-D fine microstructures

Hirokazu Matsumura, Hironobu Sato, Yoshitaka Houshi, Shuichi Shoji

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

This paper presents the fabrication of all plastic microfluidic devices with built-in 3-D fine microstructures. The built-in micromeshes in the microchannel were formed by the combination of the multi-angle inclined backside exposure and top side exposure of thick Epon SU-8 photoresist on a glass substrate. The lift off method, using LOR (Lift-off Resist) as a sacrificial layer, was utilized to remove the all SU-8 device from the substrate. The monolithic plastic structures realize uniform physical and chemical properties required in microfluidic devices for practical applications. Fragmentation of a water droplet in organic carrier formed by two phase flow was demonstrated.

本文言語English
ホスト出版物のタイトルDigest of Papers - Microprocesses and Nanotechnology 2005
ホスト出版物のサブタイトル2005 International Microprocesses and Nanotechnology Conference
ページ270-271
ページ数2
出版ステータスPublished - 2005 12 1
イベント2005 International Microprocesses and Nanotechnology Conference - Tokyo, Japan
継続期間: 2005 10 252005 10 28

出版物シリーズ

名前Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference
2005

Conference

Conference2005 International Microprocesses and Nanotechnology Conference
CountryJapan
CityTokyo
Period05/10/2505/10/28

ASJC Scopus subject areas

  • Engineering(all)

フィンガープリント 「All plastic microfluidic device with built-in 3-D fine microstructures」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル