Amorphous-to-crystalline transition during the early stages of thin film growth of Cr on SiO2

Minghui Hu, Suguru Noda, Hiroshi Komiyama

研究成果: Article査読

19 被引用数 (Scopus)

抄録

A study was performed on amorphous-to-crystalline transition during the early stages of thin film growth. Transmission electron microscopy was used to study the growth of sputter-deposited chromium thin films on silica. The existence of interfacial Cr-O interactions was confirmed by the depth profile analysis by x-ray photoelectron spectroscopy.

本文言語English
ページ(範囲)9336-9344
ページ数9
ジャーナルJournal of Applied Physics
93
11
DOI
出版ステータスPublished - 2003 6 1
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(全般)

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