Amorphous-to-crystalline transition during the early stages of thin film growth of Cr on SiO2

Minghui Hu, Suguru Noda, Hiroshi Komiyama

研究成果: Article

16 引用 (Scopus)

抄録

A study was performed on amorphous-to-crystalline transition during the early stages of thin film growth. Transmission electron microscopy was used to study the growth of sputter-deposited chromium thin films on silica. The existence of interfacial Cr-O interactions was confirmed by the depth profile analysis by x-ray photoelectron spectroscopy.

元の言語English
ページ(範囲)9336-9344
ページ数9
ジャーナルJournal of Applied Physics
93
発行部数11
DOI
出版物ステータスPublished - 2003 6 1
外部発表Yes

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thin films
x ray spectroscopy
chromium
photoelectron spectroscopy
silicon dioxide
transmission electron microscopy
profiles
interactions

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

これを引用

Amorphous-to-crystalline transition during the early stages of thin film growth of Cr on SiO2 . / Hu, Minghui; Noda, Suguru; Komiyama, Hiroshi.

:: Journal of Applied Physics, 巻 93, 番号 11, 01.06.2003, p. 9336-9344.

研究成果: Article

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