An all SU-8 microfluidic chip with built-in 3D fine microstructures

Hironobu Sato, Hirokazu Matsumura, Satoshi Keino, Shuichi Shoji

    研究成果: Article

    82 引用 (Scopus)

    抄録

    This paper describes the fabrication method of an all SU-8 microfluidic device with built-in 3D fine micromesh structures. 3D micromesh structures were seamlessly integrated into the SU-8 sealed microchannel. To eliminate gap formation and filling of the microchannel, the built-in micromeshes in the microchannel were formed by photolithography after bonding the SU-8 top-cover layer and the SU-8 bottom substrate. The lift-off method, using lift-off resist as a sacrificial layer, was utilized to release the all SU-8 microfluidic chips. Monolithic SU-8 structures realize uniform physical and chemical surface properties required in microfluidic devices for practical use. As an application, fragmentation of a water droplet in an organic carrier formed by a two-phase flow was demonstrated.

    元の言語English
    記事番号010
    ページ(範囲)2318-2322
    ページ数5
    ジャーナルJournal of Micromechanics and Microengineering
    16
    発行部数11
    DOI
    出版物ステータスPublished - 2006 11 1

    Fingerprint

    microchannels
    Microchannels
    Microfluidics
    microfluidic devices
    chips
    microstructure
    Microstructure
    Photolithography
    two phase flow
    photolithography
    Two phase flow
    surface properties
    Surface properties
    fragmentation
    fine structure
    Fabrication
    fabrication
    Water
    Substrates
    water

    ASJC Scopus subject areas

    • Instrumentation
    • Materials Science(all)
    • Mechanics of Materials
    • Computational Mechanics

    これを引用

    An all SU-8 microfluidic chip with built-in 3D fine microstructures. / Sato, Hironobu; Matsumura, Hirokazu; Keino, Satoshi; Shoji, Shuichi.

    :: Journal of Micromechanics and Microengineering, 巻 16, 番号 11, 010, 01.11.2006, p. 2318-2322.

    研究成果: Article

    Sato, Hironobu ; Matsumura, Hirokazu ; Keino, Satoshi ; Shoji, Shuichi. / An all SU-8 microfluidic chip with built-in 3D fine microstructures. :: Journal of Micromechanics and Microengineering. 2006 ; 巻 16, 番号 11. pp. 2318-2322.
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