An all SU-8 microfluidic chip with built-in 3D fine microstructures

Hironobu Sato*, Hirokazu Matsumura, Satoshi Keino, Shuichi Shoji

*この研究の対応する著者

研究成果: Article査読

88 被引用数 (Scopus)

抄録

This paper describes the fabrication method of an all SU-8 microfluidic device with built-in 3D fine micromesh structures. 3D micromesh structures were seamlessly integrated into the SU-8 sealed microchannel. To eliminate gap formation and filling of the microchannel, the built-in micromeshes in the microchannel were formed by photolithography after bonding the SU-8 top-cover layer and the SU-8 bottom substrate. The lift-off method, using lift-off resist as a sacrificial layer, was utilized to release the all SU-8 microfluidic chips. Monolithic SU-8 structures realize uniform physical and chemical surface properties required in microfluidic devices for practical use. As an application, fragmentation of a water droplet in an organic carrier formed by a two-phase flow was demonstrated.

本文言語English
論文番号010
ページ(範囲)2318-2322
ページ数5
ジャーナルJournal of Micromechanics and Microengineering
16
11
DOI
出版ステータスPublished - 2006 11 1

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 材料力学
  • 機械工学
  • 電子工学および電気工学

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