An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique

Kazuhiro Takahashi, Toshinori Fujie, Nobutaka Sato, Shinji Takeoka, Kazuaki Sawada

研究成果: Conference contribution

1 引用 (Scopus)

抜粋

We developed an elastomer-based Fabry-Perot interferometer with 120-1080 nm gap between a freestanding thin film and a substrate using dry transfer technique. A newly developed elastomeric nanosheet using a polystyrene-polybutadiene-polystyrene triblock copolymer (SBS) provides low Young's modulus of 40 MPa, large elastic strain of 40%, and high adhesiveness. A freestanding SBS nanosheet can be formed by dry transfer technique without vacuum and high temperature processes owing to the high adhesiveness of SBS nanosheet. A minimum gap length of 120 nm with an 80 μm in diameter was achieved. With the pressure change, the freestanding membrane was found to deform with good adhesion between the dry transferred SBS and the substrate.

元の言語English
ホスト出版物のタイトル2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
出版者Institute of Electrical and Electronics Engineers Inc.
ページ704-707
ページ数4
ISBN(電子版)9781509050789
DOI
出版物ステータスPublished - 2017 2 23
イベント30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
継続期間: 2017 1 222017 1 26

Other

Other30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
United States
Las Vegas
期間17/1/2217/1/26

    フィンガープリント

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

これを引用

Takahashi, K., Fujie, T., Sato, N., Takeoka, S., & Sawada, K. (2017). An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique. : 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 704-707). [7863505] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863505