An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications

Ryunosuke Gando*, Haruka Kubo, Yasushi Tomizawa, Etsuji Ogawa, Shunta Maeda, Kei Masunishi, Yohei Hatakeyama, Tetsuro Itakura, Tamio Ikehashi

*この研究の対応する著者

研究成果: Conference contribution

5 被引用数 (Scopus)

抄録

This paper presents the first intermittent free-vibration MEMS gyroscope enabled by a 'Catch-and-Release (CR)' drive mechanism, which realizes substantial power reduction and fast startup compared to existing stationary gyroscopes. In this architecture, the proof mass is captured at the maximum displacement position (catch-state), and then released to free vibration during which the Coriolis detection is performed (release-state). Thanks to the high quality factor (Q) of 72000, the released mass can be re-captured before attenuation. This CR mechanism enables instant startup and low power. The functionality and sensitivity (21.2 μV/dps) of a prototype CR gyroscope (CR-G) are confirmed by experiments.

本文言語English
ホスト出版物のタイトル2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
出版社Institute of Electrical and Electronics Engineers Inc.
ページ29-32
ページ数4
ISBN(電子版)9781509050789
DOI
出版ステータスPublished - 2017 2 23
外部発表はい
イベント30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
継続期間: 2017 1 222017 1 26

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Other

Other30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
国/地域United States
CityLas Vegas
Period17/1/2217/1/26

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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