An ionization gauge with a cold electron source for an extremely high vacuum

C. Oshima*, T. Satoh, A. Otuka

*この研究の対応する著者

研究成果: Article査読

29 被引用数 (Scopus)

抄録

An ionization gauge with a cold electron source has been constructed, and its performance has been evaluated. The Spindt emitter used as the cold source has shown the stable emission current of 1 mA, and the low outgas condition has been obtained after the long operation of 1 mA emission for approximately 1 month. Between the cold and hot electron sources, no large difference concerning the stability of the emission and the outgas has been detected in extremely high vacuum of 1 × 10-10 Pa, and the sensitivity of the gauge with the cold electron source (1.9×1010 cps Pa-1 at 0.1 mA reduced for nitrogen gas) was slightly higher than that of the gauge with the hot electron source.

本文言語English
ページ(範囲)595-597
ページ数3
ジャーナルVacuum
44
5-7
DOI
出版ステータスPublished - 1993

ASJC Scopus subject areas

  • 表面、皮膜および薄膜
  • 凝縮系物理学
  • 表面および界面

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