An orientation ratio and ferroelectric properties of ultra-thin PTO films

K. Nishida*, T. Sugino, M. Osada, M. Kakihana, T. Katoda

*この研究の対応する著者

研究成果: Article査読

3 被引用数 (Scopus)

抄録

The relationship among crystallographic orientation and quality, flatness of a surface, electrical properties and thickness for lead titanate (PbTiO3: PTO) ultra-thin films is reported. A crystallographic orientation changed from (100) to (001) with an increase in film thickness. However, a (001) plane orientation ratio α saturated to 0.85 and root square mean (RMS) of flatness saturated to 1.4nm when the film thickness was approximately 90nm. A PTO film thinner than approximately 90nm had a larger dielectric constant and that thicker than approximate 90nm showed ferroelectric property.

本文言語English
ページ(範囲)312-317
ページ数6
ジャーナルApplied Surface Science
216
1-4 SPEC.
DOI
出版ステータスPublished - 2003 6 30
外部発表はい

ASJC Scopus subject areas

  • 物理化学および理論化学
  • 表面、皮膜および薄膜
  • 凝縮系物理学

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