An RF-MEMS tunable capacitor using quadruple series capacitor structure and brittle material springs

Hiroaki Yamazaki*, Tamio Ikehashi, Tomohiro Saito, Etsuji Ogawa, Takayuki Masunaga, Kei Masunishi, Yasushi Tomizawa, Tatsuya Ohguro, Yoshiaki Sugizaki, Hideki Shibata

*この研究の対応する著者

研究成果

抄録

In this paper, we show an RF-MEMS tunable capacitor that achieves excellent creep immunity and high power-handling capability. The tunable capacitor has a quadruple series capacitor (QSC) structure. The measured result demonstrates +36dBm hot-switching at 85°C with 21V pull-in voltage. The creep immunity is attained by employing SiN spring at the stress concentrations. Compared with aluminum springs, the creep deformation is reduced by a factor of 23 at 100°C.

本文言語English
ホスト出版物のタイトルAdvanced Metallization Conference 2010
ページ203-204
ページ数2
出版ステータスPublished - 2010 12 1
外部発表はい
イベントAdvanced Metallization Conference 2010 - Albany, NY, United States
継続期間: 2010 10 52010 10 7

出版物シリーズ

名前Advanced Metallization Conference (AMC)
ISSN(印刷版)1540-1766

Conference

ConferenceAdvanced Metallization Conference 2010
国/地域United States
CityAlbany, NY
Period10/10/510/10/7

ASJC Scopus subject areas

  • 材料科学(全般)
  • 産業および生産工学

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