An RF-MEMS tunable capacitor using quadruple series capacitor structure and brittle material springs

Hiroaki Yamazaki, Tamio Ikehashi, Tomohiro Saito, Etsuji Ogawa, Takayuki Masunaga, Kei Masunishi, Yasushi Tomizawa, Tatsuya Ohguro, Yoshiaki Sugizaki, Hideki Shibata

研究成果: Conference contribution

抄録

In this paper, we show an RF-MEMS tunable capacitor that achieves excellent creep immunity and high power-handling capability. The tunable capacitor has a quadruple series capacitor (QSC) structure. The measured result demonstrates +36dBm hot-switching at 85°C with 21V pull-in voltage. The creep immunity is attained by employing SiN spring at the stress concentrations. Compared with aluminum springs, the creep deformation is reduced by a factor of 23 at 100°C.

本文言語English
ホスト出版物のタイトルAdvanced Metallization Conference 2010
ページ203-204
ページ数2
出版ステータスPublished - 2010 12 1
外部発表はい
イベントAdvanced Metallization Conference 2010 - Albany, NY, United States
継続期間: 2010 10 52010 10 7

出版物シリーズ

名前Advanced Metallization Conference (AMC)
ISSN(印刷版)1540-1766

Conference

ConferenceAdvanced Metallization Conference 2010
国/地域United States
CityAlbany, NY
Period10/10/510/10/7

ASJC Scopus subject areas

  • 材料科学(全般)
  • 産業および生産工学

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