Analysis of longitudinal leaky surface acoustic waves on LiNbO3/amorphous layer/quartz structure

Shiori Asakawa, Junki Hayashi, Masashi Suzuki, Shoji Kakio, Ami Tezuka, Hiroyuki Kuwae, Hiroaki Yokota, Toshifumi Yonai, Kazuhito Kishida, Jun Mizuno

研究成果: Article査読

5 被引用数 (Scopus)

抄録

Recently, bonded structures comprising a quartz substrate and a LiNbO3 (LN) or LiTaO3 thin-plate have been attracting attention as a means of obtaining enhanced properties for surface acoustic wave (SAW) devices. It was reported that the bonding strength was extremely improved by utilizing an amorphous thin film as a middle layer. In this research, the propagation and resonance characteristics of longitudinal leaky SAWs on an amorphous layer inserted to the boundary between an X-cut 36°Y-propagating LN (X36°Y-LN) and X35°Y-quartz were investigated. For the metallized surface of an X36°Y-LN/Al2O3/X35°Y-quartz structure, an attenuation of 0.0001 dB /λ was obtained at an LT thin-plate thickness of 0.072λ (λ: wavelength), which was better than that of an X36°Y-LN/X35°Y-quartz structure. Utilizing a finite element method, we found that the admittance ratio and Q factor for the X36°Y-LN/Al2O3/X35°Y-quartz model were improved owing to the reduction of the leakage due to the shear-vertical particle displacement.

本文言語English
論文番号SKKC12
ジャーナルJapanese journal of applied physics
59
SK
DOI
出版ステータスPublished - 2020 7 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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