TY - JOUR
T1 - Anti-sticking curing of fluorinated polymers for improvement of mold releasability
AU - Mizuno, Jun
AU - Li, Lingyi
AU - Kawaguchi, Yasuhide
AU - Tsunozaki, Kentaro
AU - Shinohara, Hidetoshi
AU - Shoji, Shuichi
PY - 2011
Y1 - 2011
N2 - This paper describes a post-UV curing process, called anti-sticking curing process (ACP), for fluorinated polymer (NIF) molds. After fabrication by UV imprinting, an NIF mold was irradiated by a strong UV light. The results of surface free-energy calculations, X-ray photoelectron spectroscopy (XPS), and Vickers hardness measurements showed that the surface state of NIF can be described as follows: active functional groups in the photosensitive radical initiator remained on the surface of the NIF mold after UV imprinting. After ACP, these active groups were consumed by further UV polymerization, and the fluorinated components moved to the surface. Thus, an improvement in the releasability of NIF molds is expected.
AB - This paper describes a post-UV curing process, called anti-sticking curing process (ACP), for fluorinated polymer (NIF) molds. After fabrication by UV imprinting, an NIF mold was irradiated by a strong UV light. The results of surface free-energy calculations, X-ray photoelectron spectroscopy (XPS), and Vickers hardness measurements showed that the surface state of NIF can be described as follows: active functional groups in the photosensitive radical initiator remained on the surface of the NIF mold after UV imprinting. After ACP, these active groups were consumed by further UV polymerization, and the fluorinated components moved to the surface. Thus, an improvement in the releasability of NIF molds is expected.
KW - Fluorinated polymer
KW - Mold releasability
KW - Pattern shrinkage
KW - Post-curing process
UR - http://www.scopus.com/inward/record.url?scp=79961115634&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79961115634&partnerID=8YFLogxK
U2 - 10.2494/photopolymer.24.89
DO - 10.2494/photopolymer.24.89
M3 - Article
AN - SCOPUS:79961115634
SN - 0914-9244
VL - 24
SP - 89
EP - 93
JO - Journal of Photopolymer Science and Technology
JF - Journal of Photopolymer Science and Technology
IS - 1
ER -