Application of electronic devices for aerosol deposition methods

Masafumi Nakada*, Toshihiro Kawakami, Mizuki Iwanami, Keishi Ohashi

*この研究の対応する著者

研究成果: Article査読

4 被引用数 (Scopus)

抄録

Oxide materials have superior functional characteristics that are attributed to their versatile structures and chemically stable characteristics. These characteristics are expected to enable their employment as the functional device materials that are required to support the ubiquitous society. The aerosol deposition method is a nanocrystalline film forming method that employs the impact solidification phenomenon of ultra fine particles. This method enables the formation of oxide films onto any type of substrate. NEC and NEC TOKIN are co-developing piezoelectric and optical device products to be used in the aerosol deposition.

本文言語English
ページ(範囲)76-80
ページ数5
ジャーナルNEC Technical Journal
2
1
出版ステータスPublished - 2007 12 1
外部発表はい

ASJC Scopus subject areas

  • 情報システム
  • 材料科学(全般)
  • ハードウェアとアーキテクチャ
  • 電子工学および電気工学

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