Application of high purity ozone beam in the formation and characterization of SiO2 and other oxide thin films

S. Ichimura*, H. Nonaka, A. Kurokawa, K. Nakamura

*この研究の対応する著者

研究成果: Article査読

抄録

A new ozone jet generator which can supply high purity ozone beam was specially fabricated, and applied to the formation and characterization of oxide thin films. After careful investigation of SiO2 thin film formation on Si substrates using either ozone or molecular oxygen, it was confirmed that; i) an atomic oxygen generated at dissociation of ozone attacks a back bond of Si to form Si-O-Si bonding, ii) the suboxide (SiOx; x<2) formation at the SiO2/Si interface was suppressed by the ozone oxidation, and iii)a stable SiO2 film was formed by the ozone exposure at a higher substrate temperature (>about 300°C). It was also confirmed that ozone exposure during surface analysis using an electron beam could diminish (and erase) sample charging even the the thickness of a SiO2 sample is in the order of sub mm.

本文言語English
ページ(範囲)100-109
ページ数10
ジャーナルVide: Science, Technique et Applications
287 SUPPL.1
出版ステータスPublished - 1998 12 1
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(その他)
  • 表面および界面
  • 表面、皮膜および薄膜

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