APPLICATION OF MONTE CARLO CALCULATION TECHNIQUE TO QUANTITATIVE ANALYSES BY AUGER ELECTRON SPECTROSCOPY.

Ryuichi Shimizu; Shingo Ichimura; Mikio Aratama

APPLICATION OF MONTE CARLO CALCULATION TECHNIQUE TO QUANTITATIVE ANALYSES BY AUGER ELECTRON SPECTROSCOPY.

Ryuichi Shimizu, Shingo Ichimura, Mikio Aratama

研究成果: Paper › 査読

抄録

A basic study is provided of the atomic number effect for quantitative AES analyses by Monte Carlo calculation technique. Since the direct simulation of each individual inelastic scattering process used in the previous papers applies to only a few materials, the authors have attempted to incorporate a semi-empirical stopping power formula proposed by E. R. Krefting and L. Reimer instead of the individual inelastic scattering. The result describes the dependence of Auger electron intensity on primary energy obtained with a commercial SAM, JEOL JAMP III, with considerable accuracy.

本文言語	English
ページ	30-34
ページ数	5
出版ステータス	Published - 1979 1 1
外部発表	はい
イベント	Proc Annu Conf Microbeam Anal Soc 14th - San Antonio, Tex 継続期間: 1979 8 12 → 1979 8 17

Other

Other	Proc Annu Conf Microbeam Anal Soc 14th
City	San Antonio, Tex
Period	79/8/12 → 79/8/17

ASJC Scopus subject areas

Engineering(all)

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引用スタイル

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abstract = "A basic study is provided of the atomic number effect for quantitative AES analyses by Monte Carlo calculation technique. Since the direct simulation of each individual inelastic scattering process used in the previous papers applies to only a few materials, the authors have attempted to incorporate a semi-empirical stopping power formula proposed by E. R. Krefting and L. Reimer instead of the individual inelastic scattering. The result describes the dependence of Auger electron intensity on primary energy obtained with a commercial SAM, JEOL JAMP III, with considerable accuracy.",

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AU - Shimizu, Ryuichi

AU - Ichimura, Shingo

AU - Aratama, Mikio

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N2 - A basic study is provided of the atomic number effect for quantitative AES analyses by Monte Carlo calculation technique. Since the direct simulation of each individual inelastic scattering process used in the previous papers applies to only a few materials, the authors have attempted to incorporate a semi-empirical stopping power formula proposed by E. R. Krefting and L. Reimer instead of the individual inelastic scattering. The result describes the dependence of Auger electron intensity on primary energy obtained with a commercial SAM, JEOL JAMP III, with considerable accuracy.

AB - A basic study is provided of the atomic number effect for quantitative AES analyses by Monte Carlo calculation technique. Since the direct simulation of each individual inelastic scattering process used in the previous papers applies to only a few materials, the authors have attempted to incorporate a semi-empirical stopping power formula proposed by E. R. Krefting and L. Reimer instead of the individual inelastic scattering. The result describes the dependence of Auger electron intensity on primary energy obtained with a commercial SAM, JEOL JAMP III, with considerable accuracy.

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