A basic study is provided of the atomic number effect for quantitative AES analyses by Monte Carlo calculation technique. Since the direct simulation of each individual inelastic scattering process used in the previous papers applies to only a few materials, the authors have attempted to incorporate a semi-empirical stopping power formula proposed by E. R. Krefting and L. Reimer instead of the individual inelastic scattering. The result describes the dependence of Auger electron intensity on primary energy obtained with a commercial SAM, JEOL JAMP III, with considerable accuracy.
|出版ステータス||Published - 1979 1 1|
|イベント||Proc Annu Conf Microbeam Anal Soc 14th - San Antonio, Tex|
継続期間: 1979 8 12 → 1979 8 17
|Other||Proc Annu Conf Microbeam Anal Soc 14th|
|City||San Antonio, Tex|
|Period||79/8/12 → 79/8/17|
ASJC Scopus subject areas