APPLICATION OF MONTE CARLO CALCULATION TECHNIQUE TO QUANTITATIVE ANALYSES BY AUGER ELECTRON SPECTROSCOPY.

Ryuichi Shimizu, Shingo Ichimura, Mikio Aratama

研究成果: Paper査読

1 被引用数 (Scopus)

抄録

A basic study is provided of the atomic number effect for quantitative AES analyses by Monte Carlo calculation technique. Since the direct simulation of each individual inelastic scattering process used in the previous papers applies to only a few materials, the authors have attempted to incorporate a semi-empirical stopping power formula proposed by E. R. Krefting and L. Reimer instead of the individual inelastic scattering. The result describes the dependence of Auger electron intensity on primary energy obtained with a commercial SAM, JEOL JAMP III, with considerable accuracy.

本文言語English
ページ30-34
ページ数5
出版ステータスPublished - 1979 1 1
外部発表はい
イベントProc Annu Conf Microbeam Anal Soc 14th - San Antonio, Tex
継続期間: 1979 8 121979 8 17

Other

OtherProc Annu Conf Microbeam Anal Soc 14th
CitySan Antonio, Tex
Period79/8/1279/8/17

ASJC Scopus subject areas

  • Engineering(all)

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