Application of Monte Carlo calculation to fundamentals of scanning Auger electron microscopy

R. Shimizu, M. Aratama, S. Ichimura, Y. Yamazaki, T. Ikuta

研究成果: Article査読

24 被引用数 (Scopus)

抄録

Spatial distributions of Auger signals generated in an aluminum target in scanning Auger electron microscopy were obtained by Monte Carlo calculations including secondary electron generation. In the low-energy region, the cross sections calculated by the partial wave expansion method were used instead of the screened Rutherford cross section to describe the elastic scattering process. The result suggests that secondary electrons of high energy are a significant source of Auger signals, particularly LVV-Auger electrons, in scanning Auger electron microscopy.

本文言語English
ページ(範囲)692-694
ページ数3
ジャーナルApplied Physics Letters
31
10
DOI
出版ステータスPublished - 1977
外部発表はい

ASJC Scopus subject areas

  • 物理学および天文学(その他)

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