APPLICATION OF MONTE CARLO TECHNIQUE TO QUANTITATIVE AUGER ANALYSIS - APPROACH FOR QUANTITATIVE CORRECTION OF ELECTRON BACKSCATTERING EFFECT.

Ryuichi Shimizu, Shingo Ichimura

研究成果: Article

抄録

This work briefly reviews studies of the backscattering effect and then presents the authors most recent theoretical results that should lead to more accurate quantitative AES analysis. These theoretical results were obtained from Monte Carlo calculations based on the use of more precise theoretical expressions for both the elastic and inelastic scattering; i. e. , elastic scattering cross-sections calculated by the partial wave expansion method and Gryzinski's excitation function combined with Bethe's stopping power, respectively.

元の言語English
ページ(範囲)221-230
ページ数10
ジャーナルScanning Electron Microscopy
出版物ステータスPublished - 1981 1 1
外部発表Yes

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Elastic scattering
Backscattering
Electrons
Inelastic scattering
Chemical analysis

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Biophysics

これを引用

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