Atomically flat GaAs(001) surfaces obtained by high-temperature treatment with atomic hydrogen irradiation

Kengou Yamaguchi, Zhixin Qin, Hajime Nagano, Masakazu Kobayashi, Akihiko Yoshikawa, Kiyoshi Takahashi

研究成果: Article

17 引用 (Scopus)

抄録

An atomically flat GaAs(001) surface can be obtained by a two-step atomic hydrogen (atomic-H) irradiation technique. This method includes low-temperature cleaning and high-temperature smoothening of the GaAs subtle surface. The reflection high energy electron diffraction (RHEED) and AFM study showed that a wide terrace with a 1 monolayer step height was observed when a GaAs(001) surface was cleaned at 400°C and smoothened at 540°C with atomic-H irradiation. The irradiation of atomic-H during the high temperature process maintained a certain surface stoichiometry, and resulted in an atomically flat substrate surface. This technique is useful for heterovalent epitaxy systems involving a single chamber growth system.

元の言語English
ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
36
発行部数10 SUPPL. B
出版物ステータスPublished - 1997 10 15
外部発表Yes

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Irradiation
Hydrogen
irradiation
hydrogen
Temperature
phytotrons
Reflection high energy electron diffraction
Epitaxial growth
Stoichiometry
epitaxy
high energy electrons
cleaning
stoichiometry
Cleaning
Monolayers
electron diffraction
atomic force microscopy
Substrates

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

これを引用

Atomically flat GaAs(001) surfaces obtained by high-temperature treatment with atomic hydrogen irradiation. / Yamaguchi, Kengou; Qin, Zhixin; Nagano, Hajime; Kobayashi, Masakazu; Yoshikawa, Akihiko; Takahashi, Kiyoshi.

:: Japanese Journal of Applied Physics, Part 2: Letters, 巻 36, 番号 10 SUPPL. B, 15.10.1997.

研究成果: Article

Yamaguchi, Kengou ; Qin, Zhixin ; Nagano, Hajime ; Kobayashi, Masakazu ; Yoshikawa, Akihiko ; Takahashi, Kiyoshi. / Atomically flat GaAs(001) surfaces obtained by high-temperature treatment with atomic hydrogen irradiation. :: Japanese Journal of Applied Physics, Part 2: Letters. 1997 ; 巻 36, 番号 10 SUPPL. B.
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AU - Yoshikawa, Akihiko

AU - Takahashi, Kiyoshi

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