Backscattering correction factor for AuCu alloys in quantitative Auger analysis

Ding Ze‐jun*, Ryuichi Shimizu, Shingo Ichimura

*この研究の対応する著者

研究成果: Article査読

15 被引用数 (Scopus)

抄録

The backscattering factor R, which corrects matrix effects in quantitative AES analysis, was obtained from Monte Carlo calculations for the AuCu alloy system being proposed as test standard samples for quantitative surface chemical analysis. The Monte Carlo algorithm is based on the combined use of the Gryzinski's excitation function with the Bethe's stopping power for inelastic scattering and elastic scattering cross section obtained by partial wave expansion method. The calculation of R for 5 keV and 10 keV electrons at angles of incidence 0° and 45° lead to the functional representation R(Z, U) = A(Z)UB(Z) + C(Z), where Z is the mean atomic number of the sample and U the ratio of the primary energy to the binding energy. This representation describes the calculated R values within the maximum error 2%.

本文言語English
ページ(範囲)253-258
ページ数6
ジャーナルSurface and Interface Analysis
10
5
DOI
出版ステータスPublished - 1987 6
外部発表はい

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜
  • 材料化学

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