TY - JOUR
T1 - Backscattering correction factor for AuCu alloys in quantitative Auger analysis
AU - Ze‐jun, Ding
AU - Shimizu, Ryuichi
AU - Ichimura, Shingo
PY - 1987/6
Y1 - 1987/6
N2 - The backscattering factor R, which corrects matrix effects in quantitative AES analysis, was obtained from Monte Carlo calculations for the AuCu alloy system being proposed as test standard samples for quantitative surface chemical analysis. The Monte Carlo algorithm is based on the combined use of the Gryzinski's excitation function with the Bethe's stopping power for inelastic scattering and elastic scattering cross section obtained by partial wave expansion method. The calculation of R for 5 keV and 10 keV electrons at angles of incidence 0° and 45° lead to the functional representation R(Z, U) = A(Z)UB(Z) + C(Z), where Z is the mean atomic number of the sample and U the ratio of the primary energy to the binding energy. This representation describes the calculated R values within the maximum error 2%.
AB - The backscattering factor R, which corrects matrix effects in quantitative AES analysis, was obtained from Monte Carlo calculations for the AuCu alloy system being proposed as test standard samples for quantitative surface chemical analysis. The Monte Carlo algorithm is based on the combined use of the Gryzinski's excitation function with the Bethe's stopping power for inelastic scattering and elastic scattering cross section obtained by partial wave expansion method. The calculation of R for 5 keV and 10 keV electrons at angles of incidence 0° and 45° lead to the functional representation R(Z, U) = A(Z)UB(Z) + C(Z), where Z is the mean atomic number of the sample and U the ratio of the primary energy to the binding energy. This representation describes the calculated R values within the maximum error 2%.
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U2 - 10.1002/sia.740100506
DO - 10.1002/sia.740100506
M3 - Article
AN - SCOPUS:0023365998
VL - 10
SP - 253
EP - 258
JO - Surface and Interface Analysis
JF - Surface and Interface Analysis
SN - 0142-2421
IS - 5
ER -