Backscattering correction for quantitative Auger analysis. I. Monte Carlo calculations of backscattering factors for standard materials

S. Ichimura, R. Shimizu

研究成果: Article査読

273 被引用数 (Scopus)

抄録

The electron backscattering effect which is important for the quantitative interpretation of "matrix effects" in AES is investigated by applying the Monte Carlo calculation technique. The present calculation model is based on the use of a precise elastic scattering cross-section obtained by the partial wave expansion method, as well as on the combined use of Gryzinski's excitation function and Bethe's stopping power for inelastic scattering. Systematic calculations of the backscattering factors were performed for over 25 materials including pure elements, compounds, and alloys, which have been widely used as standard materials for practical Auger analysis. The results should enable the accuracy of quantitative analysis by AES to be improved.

本文言語English
ページ(範囲)386-408
ページ数23
ジャーナルSurface Science
112
3
DOI
出版ステータスPublished - 1981 12 2
外部発表はい

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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