This work was attempted to examine the validity of the backscattering factors by applying them to the quantitative Auger analysis of sputter-deposited Ni-Pt layer which is probably the most appropriate test sample of known concentration for surface analysis. The surface composition of the sputter-deposited layer determined by this quantitative analysis method agrees well with the bulk composition of sputter Ni-Pt sample. Then this approach was applied to study preferential sputtering in Au-Cu alloys. The surface composition of sputtered Au-Cu alloy sample, which is quantified similar to the Ni-Pt alloy, is in very good agreement with the bulk composition of the sputtered Au-Cu alloy.
|ジャーナル||Scanning Electron Microscopy|
|出版ステータス||Published - 1981 1 1|
ASJC Scopus subject areas
- Control and Systems Engineering