Band-tail photoluminescence in hydrogenated amorphous silicon oxynitride and silicon nitride films

Hiromitsu Kato, Norihide Kashio, Yoshimichi Ohki, Kwang Soo Seol, Takashi Noma

研究成果: Article

70 引用 (Scopus)

抜粋

The photoluminescence (PL) in the hydrogenated samples of amorphous silicon oxynitride and silicon nitride films with different nitrogen contents was investigated. The PL of the two materials showed many similarities indicating the same chemical structure, viz. Si-N bonds, and similar band-tail states. The PL decay process indicated that the recombination between localized band-tail states consisted of excitonlike and radiative tunneling recombination processes. Increase in the abundance ratio of nitrogen+oxygen or that of nitrogen resulted in a wider PL spectrum with higher peak energy.

元の言語English
ページ(範囲)239-244
ページ数6
ジャーナルJournal of Applied Physics
93
発行部数1
DOI
出版物ステータスPublished - 2003 1 1

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

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